The MINI-EOC (Electron Optical Culumn) is available for surface analysis and measurements as an electron beam source of a low acceleration SEM.
We will respond to your request of special specifications.
Sample：Cu 400 mesh（L＆S：32μｍ）
MINI-EOC can be used for measurement and analysis that require high current density and low acceleration voltage such as LEED (Low Energy Electron Diffraction), AES (Auger Electron Spectroscopy), EDX (Energy Dispersive X-ray spectrometry), EELS (Electron Energy Loss Spectroscopy) and so on. It is also used in combination with SPM (Scanning Probe Microscope) which requires ultra-high vacuum.
* A power supply is necessary to operate MINI-EOC.
* We also sell SED (Secondary Electron Detectors) for detection as a SEM.
Attachable electron beam barrel
It can be installed on the ICF 114 flange.
Ultrahigh vacuum system
Baking up to 150 ℃ is possible.
Low acceleration observation
It is possible to observe the outermost surface of the sample.
(The acceleration voltage can be set from several tens of V to 5 kV.)
High current density electron beam
Signal detection is possible with irradiation current of 〜10 nA.
It can be applied to the sample which dislikes the magnetic field because the lens and the deflection electrodes are electrostatic type.
Electron gun gate valve
Even if the sample chamber is released to the atmosphere, the vacuum of the electron gun chamber can be maintained.
Configuration for electron microscopy
◆Electron beam lithography using MINI-EOC
◆Bio-sample observations without metal coating
◆For the bservation of four-point probes in a STM (scanning tunneling microscope)
◆For the source of Mott detector
◆For the source of EBSD (Electron Backscatter Diffraction)
3×10-12 〜10-8 A
ca. 10 nm
Vacuum condition: less than 2×10-3 Pa
ca. 19 kg
Electrostatic, 8-pole, single layer
Electrostatic, 8-pole, double layer