Electron microscope & associated equipment maker

The MINI-EOC (Electron Optical Culumn) is available for surface analysis and measurements as an electron beam source of a low acceleration SEM.

We will respond to your request of special specifications.

MINI-EOC		Secondary electron images at low acceleration voltages Sample：Cu 400 mesh（L＆S：32μｍ）

MINI-EOC can be used for measurement and analysis that require high current density and low acceleration voltage such as LEED (Low Energy Electron Diffraction), AES (Auger Electron Spectroscopy), EDX (Energy Dispersive X-ray spectrometry), EELS (Electron Energy Loss Spectroscopy) and so on. It is also used in combination with SPM (Scanning Probe Microscope) which requires ultra-high vacuum.
* A power supply is necessary to operate MINI-EOC.
* We also sell SED (Secondary Electron Detectors) for detection as a SEM.

Features

Attachable electron beam barrel

It can be installed on the ICF 114 flange.

Ultrahigh vacuum system

Baking up to 150 ℃ is possible.

Low acceleration observation

It is possible to observe the outermost surface of the sample.
(The acceleration voltage can be set from several tens of V to 5 kV.)

High current density electron beam

Signal detection is possible with irradiation current of 〜10 nA.

Electrostatic-typed electrode

It can be applied to the sample which dislikes the magnetic field because the lens and the deflection electrodes are electrostatic type.

Electron gun gate valve

Even if the sample chamber is released to the atmosphere, the vacuum of the electron gun chamber can be maintained.

Configuration for electron microscopy

Application

◆Electron beam lithography using MINI-EOC	◆Bio-sample observations without metal coating

◆For the bservation of four-point probes in a STM (scanning tunneling microscope)
◆For the source of Mott detector
◆For the source of EBSD (Electron Backscatter Diffraction)

Specification

Configuration