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Precision scriber AMC series
This is a device for making cross section specimens for SEM observation of mask glass, silicon, SiC, liquid crystal substrate, sapphire substrate and so on.
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We have a AMC-7600 and AMC-7800 for product demonstrations.
The AMC series can scribe wafers, masks and TFTs with high precision. By using the AMC series, we can obtain the cross-section surface with easily produced.
The AMC series is a device only for scribing.
Features
High-accuracy positioning
It is possible to scribe with position accuracy of } 2.5 Κm.
Easy operation
The procedure is as follows.
@Specify the scribing position ("Teaching")
AAutomatically scribe by pressing the start button
BSkip over the observation area according to the teaching
CFracture of the sample
DCutout of the sumple
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| How to use (movie) |
Pressure holding system
Even if the specimen has a curved surface, it is possible to scribe the desired position at a constant pressure and constant speed.(patented)
Specification
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Semiconductor wafers |
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*The target area shoud be clipped if the sample is larger than 200 mm. |
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