Milestones
1987 |
APCO Ltd. was established. ¨ |
|
1988 |
SEM (Scanning Electron Microscope) for EPMA was developed. |
|
1992 |
Electron beam device for R & D was developed. |
|
1993 |
Precision scriber was developed. |
|
1995 |
"MINI-EOC" for UHV was commercialized. ¨ |
|
1996 |
Electron gun was used in sounding rocket. ¨ |
|
1997 |
Ion sputter systemEPlasma coating system was developed. |
|
1998 |
Tester power supply for electron gun was developed. |
|
1999 |
General purpose SEM was developed. |
|
2000 |
"MINI-SED" for UHV was commercialized. ¨ |
|
2001 |
Precision scriber "AMC series" was commercialized. ¨ |
|
2003 |
MINI-EOC for surface analysis was developed. |
|
2004 |
Micro electron beam source "MINI-GUN" was
developed. ¨ |
|
2005 |
Testing equipment for cold Field Emission (CFE) electron gun was developed. |
|
2007 |
Project of ultra high resolution SEM development was started to observe CFE electron source. ¨ |
|
2009 |
Project of nano-imaging system development was started. ¨ |
|
2011 |
Electron biprism system was commercialized. ¨ |