 |
 |
 |
 |
 |
 |
 |
 |
Backup power supply AIP
AIP is a power supply for ion pump control with secondary battery. By using this power supply, it is possible to maintain a high vacuum condition during a power outage, a long vacation and transportation.
◆Continuous operation for up to seven days is possible. |
 |
◆It is possible to cope with a momentary blackout. | |
◆Up to 3 pumps can be driven. | |
◆It is possible to monitor voltage and current. | |
◆Trickle charging function is installed. | |
◆High-voltage output safety circuit is included. | |
◆It is easy to move because it is equipped with casters. |
Specification
Sputter ion pump backup power supply / AIP-38 |
||
CANON ANELVA, Agilent Technologies, HITACHI |
||
≧180 h (at 80 μA) *1 |
||
Voltage / Current |
4.0〜4.8 kV / 100 μA *2 |
|
Ripple |
2.5 Vp-p |
|
Number of system |
1〜3 |
|
Voltage |
AC 100 V ±10%, 50 / 60 Hz |
|
Wattage |
200 W |
|
Capacity of battery |
12 V, 38 Ah (NP-12 / GS・YUASA) *2 |
|
Output voltage |
0〜15 kV |
|
Output current |
0〜150 μA / 0〜1.5 mA |
|
Battery voltage |
0〜15 V |
|
An external signal can shut off the power supply. |
||
environment |
Temperature |
15〜40 ℃ |
Humidity |
< 60 %Rh |
|
ca. 32 kg（Body：18 kg, Battery：13.8kg） |
||
250W × 410D × 360H mm (Excluding protrusions)  |
||
*1 It depends on the remaining battery power.
*2 The required output current depends on the pump type and degree of vacuum.
*3 Fully sealed lead storage battery
Connection diagram
Customization
We will respond to your request of special specifications.
○Change of connector shape (compatible model)
○Change of output voltage (-4 kV, -3 kV, for noble pump etc.)
○Change of battery capacity